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41.
42.
光学光刻是目前超大规模集成电路(VLSI)制备中主要的微米和亚微米的图形加工技术,这一技术将继续保持其主导地位成为90年代VLSI发展的关键。本文综述了近年来光学光刻工艺的发展,主要介绍了G线(436nm)、Ⅰ线(365nm)和准分子激光光刻的现状,并对实现高的光学光刻分辨率所必须解决的透镜设计、套准精度和像场面积等问题作了详细描述。最后展望了发展方向、 相似文献
43.
R.A. Gunasekaran M. Agarwal A. Singh P. Dubasi P. Coane K. Varahramyan 《Optics and Lasers in Engineering》2005,43(6):1086
A novel small fluid controlled optical lens system that is capable of displaying dynamic variation of its focal length and field-of-view (FOV) is designed and fabricated. In this active lens system, appropriate volume of the optical fluid can be pumped into or out of the lens chamber to provide double-convex (DCX) or double-concave (DCV) lens effect. Simple optical imaging experiments were performed using different sets of glass lenses with fixed focal lengths to determine the optimum lens configuration required for designing a dynamic optical lens system. The experimental results obtained from the glass lenses demonstrate that a combination of a single DCX lens with three DCV lenses provides a wider FOV. The flexible membranes for fluid controlled lenses were fabricated using polydimethylsiloxane polymer material, which has good optical transparency and elasticity. A simple fluid injection system is used to vary the radius of curvature of the lenses, and thereby to change the focal length. A dynamic optical lens system with a combination of one DCX and multiple variable focal length DCV lenses as designed here can image an object with a wide range of focal length and FOV. With this fluid controlled optical system, the FOV and focal length could be continuously varied and a maximum FOV of 118.3° could be achieved. The smallest f-number (f/#) for this fluid controlled single lens system was found to be 1.3, which corresponds to the numerical aperture value of 0.35. 相似文献
44.
In this paper, a projection method is presented for solving the flow problems in domains with moving boundaries. In order to track the movement of the domain boundaries, arbitrary‐Lagrangian–Eulerian (ALE) co‐ordinates are used. The unsteady incompressible Navier–Stokes equations on the ALE co‐ordinates are solved by using a projection method developed in this paper. This projection method is based on the Bell's Godunov‐projection method. However, substantial changes are made so that this algorithm is capable of solving the ALE form of incompressible Navier–Stokes equations. Multi‐block structured grids are used to discretize the flow domains. The grid velocity is not explicitly computed; instead the volume change is used to account for the effect of grid movement. A new method is also proposed to compute the freestream capturing metrics so that the geometric conservation law (GCL) can be satisfied exactly in this algorithm. This projection method is also parallelized so that the state of the art high performance computers can be used to match the computation cost associated with the moving grid calculations. Several test cases are solved to verify the performance of this moving‐grid projection method. Copyright © 2004 John Wiley Sons, Ltd. 相似文献
45.
In this work we consider computing and continuing connecting orbits in parameter dependent dynamical systems. We give details
of algorithms for computing connections between equilibria and periodic orbits, and between periodic orbits. The theoretical
foundation for these techniques is given by the seminal work of Beyn in 1994, “On well-posed problems for connecting orbits
in dynamical systems”, where a numerical technique is also proposed. Our algorithms consist of splitting the computation of
the connection from that of the periodic orbit(s). To set up appropriate boundary conditions, we follow the algorithmic approach
used by Demmel, Dieci, and Friedman, for the case of connecting orbits between equilibria, and we construct and exploit the
smooth block Schur decomposition of the monodromy matrices associated to the periodic orbits. Numerical examples illustrate
the performance of the algorithms.
This revised version was published online in July 2006 with corrections to the Cover Date. 相似文献
46.
47.
Let Hn be an n-dimensional Haar subspace of
and let Hn−1 be a Haar subspace of Hn of dimension n−1. In this note we show (Theorem 6) that if the norm of a minimal projection from Hn onto Hn−1 is greater than 1, then this projection is an interpolating projection. This is a surprising result in comparison with Cheney and Morris (J. Reine Angew. Math. 270 (1974) 61 (see also (Lecture Notes in Mathematics, Vol. 1449, Springer, Berlin, Heilderberg, New York, 1990, Corollary III.2.12, p. 104) which shows that there is no interpolating minimal projection from C[a,b] onto the space of polynomials of degree n, (n2). Moreover, this minimal projection is unique (Theorem 9). In particular, Theorem 6 holds for polynomial spaces, generalizing a result of Prophet [(J. Approx. Theory 85 (1996) 27), Theorem 2.1]. 相似文献
48.
大视场短焦距镜头CCD摄像系统的畸变校正 总被引:11,自引:1,他引:10
从光学测量角度出发,结合计算机视觉中的摄像机标定方法,解决了大视场短焦距镜头CCD摄像系统的畸变校正问题。与摄像机标定不同,畸变校正中仅标定内部参数,外部参数作为已知条件。采用线性畸变模型,由最小二乘法解线性方程组得到摄像系统畸变模型的畸变系数。介绍了数字图像中像素间距和光学中心的标定方法。通过比较由标定参数得到的畸变图像和摄像机采集的畸变图像对实验标定精度进行评定,实验结果表明边缘视场(112°)的标定精度达到了0 75%。 相似文献
49.
本文来自于作者的实践。介绍了加工方法及测量问题。重点叙述了加工中的一些关键,同时也提供了国内外在这方面的进展情况。 相似文献
50.